Abstract:With the rapid development of modern manufacturing, robotics, precision measurement and other fields, the demand for multi-dimensional force sensors to accurately measure multi-directional forces has become increasingly prominent. Research on piezoelectric multi-dimensional force sensors has been initiated to address the problem of improving the accuracy of force control and feedback in robot arms and complex mechanical systems. Based on the d33 mode of piezoelectric ceramics, this paper designs a piezoelectric multi-dimensional force sensor that can accurately measure forces in the X, Y, and Z directions. The sensor adopts a cubic structure, and the piezoelectric sheets are placed vertically to the X, Y, and Z axes, respectively to achieve independent measurement and self-decoupling of multi-dimensional forces. The parameters and meshes are set in COMSOL Multiphysics to simulate and analyze the stress distribution and deformation of the overall structure when loads are applied in different directions. A three-dimensional sensor measurement system is established by combining a microcomputer-controlled electronic universal testing machine, sensors, and signal acquisition equipment to achieve three-dimensional force measurement and analysis. The study shows that the force in each loading direction can be accurately applied to the target piezoelectric sheet through a reasonably designed transfer path, and it is able to test the normal force of 0~500 N (Z direction) and the shear force of 0~200 N (X and Y directions). The designed sensor has good dynamic response capability, high sensitivity, precise directional resolution high-precision directionality and relatively stable repeatability, with a sensitivity of 0.080 V/N in the Z direction, 0.110 V/N in the X direction, and 0.113 V/N in the Y direction, and crosstalk in each direction is less than 0.2%. It has a broad application prospect in the field of multi-dimensional force measurement, providing important experimental data and theoretical support for the design and optimization of multi-dimensional force sensors.