In nanotechnology research area, since the material and device′s critical dimensional size decrease as well as the geometric structure complexity increase, bringing the continuous challenges in micro/nanometer accuracy measurements. Micro/Nanometer geometric quantity metrology research is the way to keep measurement quantities accuracy, uniformity and all measurement results trace back to international length basic unit. In order to keep the country′s advantages in nanotechnology research and industry area, developed countries have alwaysattached great importance to nanometer geometric quantity metrology research. In China, currently we have also successfully built several micro/nanometer geometric quantity measurement standard devices, which preliminarily established our nation′s nanometer standard traceability framework. The paper reviews the micro/nanometer measurement technologies and measurement standard devices in China, and discusses micro/nanometer metrology′s development for future.