To meet the requirements of high-precision pressure measurement in various applications, such as liquid and gas, a mediumisolated MEMS resonant pressure sensor is designed. To reduce the pressure transfer losses and nonlinearities during oil-filled packaging, the structural parameters of the corrugated diaphragm are simulated and optimized, and the diaphragm parameters suitable for the sensor core are determined. By using MEMS processing technologies and vacuum micro-filling methods, the MEMS resonant pressure sensor chip production and oil-filled packaging are completed. The dual resonator pressure and temperature multi-parameter co-sensing methods are utilized, and the temperature self-compensation is realized without the addition of a temperature sensor. The test shows that the accuracy of the packaged sensor is better than ±0. 01% FS, hysteresis error is better than 0. 006% FS, nonlinearity error is better than 0. 003% FS, and repeatability error is better than 0. 008% FS in the operating temperature range of -55℃ ~ 85℃ .