Miniature optical fiber Fabry-Perot pressure sensor based on hyper-elastic material
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TH-823 TP-212

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    Abstract:

    A design and fabrication method of miniature optical fiber Fabry-Perot pressure sensor based on hyper-elastic material is proposed to meet the needs of vivo interventional medical applications. Through theoretical analysis, a Mooney-Rivlin mechanical simulation model suitable for hyper-elastic silicone rubber material is formulated. The compression deformation state of pressure sensing materials with different components and thickness is theoretically analyzed, and the optimized sensor materials and structural parameters are obtained. The fabrication method of the sensor is further proposed, and the pressure-sensing performance of the sensor is evaluated by the pressure-sensing performance test, temperature influence test and the in vitro blood pressure test. The results show that when the diameter of the pressure-sensing material is 180 μm and the thickness is 250 μm, the pressure sensitivity of the sensor within the pressure measuring range of 0 ~ 40 kPa reaches 154. 56 nm/ kPa, and the relative error of pressure measurement caused by a large temperature range of 20℃ ~50℃ is only 0. 36% . The influence of temperature on pressure measurement is completely negligible. Compared with the traditional diaphragm optical fiber pressure sensor, the miniature optical fiber Fabry-Perot pressure sensor based on the hyper-elastic material is not only small in size, high in sensitivity, but also has the technical advantages of low cost and convenient fabrication.

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  • Received:
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  • Online: July 04,2023
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