Design, fabrication and test of high overload resistance MEMS silicon-based ring wave gyroscope
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TH89

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    Abstract:

    The traditional micro electro mechanical system (MEMS) vibrating gyroscope cannot survive in the process of high overload and the parameters change greatly before and after the impact. To address these issues, this article proposes the MEMS solid ring wave gyroscope, including its design, processing and testing. Firstly, a gyroscope structure with a fully symmetrical beam and potting technology is proposed, which can effectively reduce the residual stress in the structure during the impact process. The stop mechanism is utilized to enhance the viability of the gyroscope during the impact process. Based on this structure, the dynamic equation of the gyroscope and the impact oscillation motion function of the sensitive axis are derived. And the sensitive axis impact mode is investigated that the higher natural frequency and the smaller quality factor can improve the anti-shock performance of the gyroscope on the sensitive axis. Secondly, the modal analysis and impact characteristic simulation of the gyro structure are implemented by using the finite element analysis software. Results show that the maximum displacement and stress of the gyroscope structure are 9. 46 μm and 99. 6 MPa, respectively, when the shock amplitude is 15 000 g with 10 ms wide pulse. These results ensure that the gyroscope structure has a good anti impact margin. Thirdly, the mature glass silicon bonding and deep silicon etching process are used to realize the processing of the gyroscope structure. And the vacuum packaging of the gyroscope structure is realized by combining ceramic packaging. The test system of the gyroscope is established by the driving closed loop and detection open loop. Finally, in the laboratory environment, the impact test of the gyroscope prototype is realized by using the impact platform. During the impact process (pulse width 0. 6 ms), there are several peaks of more than 5 000 g. The maximum peak value is 16 050 g, the response time of the gyroscope is about 1 s, and the change of the gyroscope zero position before and after the impact is less than 1% . The anti-overload ability of the prototype developed in this article is verified.

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  • Received:
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  • Online: February 06,2023
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