Planar magnetic field linear time-grating displacement sensor with end-effect suppression
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TH712

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    Abstract:

    Aiming at the problem that the uniformity of the uniform motion coordinate system is reduced due to the end effect of the planar magnetic field linear time-grid displacement sensor developed in the early stage, a method for suppressing the end effect of the planar coil is proposed, and an alternating magnetic field with higher uniformity is constructed. A new type of plane linear time grating displacement sensor that can suppress the end effect is developed. A mathematical model of planar coil excitation is formulated to analyze the influence of the end effect on the uniform magnetic field, and a double-layer complementary excitation coil structure is proposed to suppress the end effect. The dual-column excitation unit realizes the synthesis of travelling wave signals and verifies the effectiveness of the scheme through simulation. A simulation model to analyze the influence of the end effect on the measurement accuracy of the sensor is established, and the sensor parameters are optimized. Based on the PCB process, a new sensor prototype with a measuring range of 228 mm is fabricated and compared with the traditional sensor prototype. Experimental results show that the new planar linear time grating displacement sensor can effectively suppress the end effect of the sensor and improve the measurement accuracy. The intrapolar raw measurement accuracy is improved from ±20 μm to ±10 μm.

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  • Received:
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  • Online: February 06,2023
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