The MEMS piezoelectric vibration table can achieve micron-level precision mechanical vibration, which is applied to the onchip calibration of MEMS inertial sensors. However, the thermal expansion coefficients of piezoelectric ceramics and silicon are different, which could result in residual stresses in MEMS piezoelectric beams after manufacturing and forming. The residual stress may lead to the warpage of the MEMS piezoelectric beam and cause the vibration table to have the initial displacement. To analyze the influence of the initial displacement on the vibration characteristics of the MEMS piezoelectric vibration table, the relationship among the residual stress, the deformation of piezoelectric beam and the initial displacement of vibration table is established. Then, the initial displacement is introduced into the vibration model of the MEMS piezoelectric vibration table, and the vibration characteristics of the MEMS piezoelectric vibration table with different initial displacements (10、 20 and 30 μm) are discussed. Experimental results show that under 10 V ( 150 Hz) sinusoidal excitation, the MEMS piezoelectric vibration table with the initial displacement has bistable vibration characteristics and the vibration waveform distortion, and the maximum relative error is 45% . Results are consistent with the theoretical analysis and prove that the residual stress is the main cause of the distortion of the vibration waveform.