Abstract:Presents a high precision multi-turn absolute time-grating angular displacement sensor, which is based on the re-modulation scheme. The sensor consists of a single-turn absolute sensor and a multi-turn counting module. Firstly, a two-stage single row timegrating angular displacement sensor is used to form a single-turn absolute sensor. Four orthogonal traveling wave signals are constructed through the first stage sensor. And two differential traveling wave signals are directly reflected as precise measurement signals. Meanwhile, the first four orthogonal traveling wave signal is utilized as the excitation signal of the second sensor for re-modulation to achieve the whole cycle single cycle signal, which is used as the rough measurement signal. The precise measurement signal is combined with the rough measurement signal to realize the high-precision single-turn absolute angular displacement measurement. On this basis, combined with Wiegand multi-turn counting module to record the turn number information, high-precision multi-turn absolute angular displacement measurement is realized. The principle prototype is made by PCB technology. The experimental platform is established, and the experiment is carried out. Experimental results show that the original accuracy of the sensor in the whole cycle range can reach ±8″. And the accurate memory of the number of turns is realized in the case of power on and power off.