Abstract:In order to solve the problems of force coupling effect and measurement error of torque sensor caused by overturning torque, axial force and radial force, a novel capacitive type torque sensor is designed based on the principle of structural decoupling. The novel capacitive type torque sensor uses the builtin crossed roller bearing to achieve structural decoupling, thereby the influence of force coupling effect on measurement accuracy is eliminated. The measurement section adopts the principle of vertical plate capacitance effect and uses double differential measurement mode to improve the sensitivity and stability of the sensor. A commercial torque speed sensor was used as the standard torque meter to calibrate this novel capacitive type torque sensor and conduct decoupling verification experiment. The calibration and experiment results are as follows: the linearity of the novel capacitive type torque sensor is 104%, the resolution is 005 N·m and the maximum measurement error is about 207%, which indicates that the designed sensor can effectively reduce the influence of force coupling effect and possesses the features of structural decoupling, high sensitivity and high accuracy.