Abstract:Noncontact, high precision and rapid flatness measurement of miniature objects is required in the modern industry. In this study, the 3D laser flatness measurement system based on machine vision is developed by the 3D laser measurement method. Firstly, the scanning measurement principle and the flatness measurement principle of the 3D laser profilometer are studied. The laser line image is preprocessed to enhance the accuracy of the later measurement. Secondly, the geometric feature is positioned and coordinate transformed. The data are processed again to acquire the threedimensional measurement of the object. The system provides a measuring device and method for threedimensional noncontact, highprecision, and multidimensional measurement of microobject geometry. Finally, the physical measurement experiments verify that the realized system has the advantages of accuracy, rapidity and effectiveness. The measurement accuracy can reach 01 μm.