我国微纳几何量计量技术的研究进展
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中国计量科学研究院北京100029

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TH711

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国家重点研发计划(2016YFF0200602)、国家重点研发计划(2016YFF0200404)项目资助


Research progress of China′s micro/nanometer geometric quantity metrology technology
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National Institute of Metrology, Beijing 100029, China

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    摘要:

    随着微纳技术中材料和器件关键尺寸的减小以及几何结构复杂性的增加,给微纳尺度的精确测量带来了新的挑战。微纳几何量计量技术主要是研究微纳尺度下测量量值的准确一致,并实现量值溯源到国际长度基本单位的科学。为保证微纳技术的领先优势,国外先进国家一直高度重视微纳几何量计量技术的研究。目前,我国在微纳计量领域已成功研制了多种微纳几何量计量标准装置,并初步建立了我国自己的微纳计量溯源体系。对我国现有的微纳几何量计量技术与计量标准装置进行了回顾和介绍,并对我国微纳计量的未来发展做出了展望。

    Abstract:

    In nanotechnology research area, since the material and device′s critical dimensional size decrease as well as the geometric structure complexity increase, bringing the continuous challenges in micro/nanometer accuracy measurements. Micro/Nanometer geometric quantity metrology research is the way to keep measurement quantities accuracy, uniformity and all measurement results trace back to international length basic unit. In order to keep the country′s advantages in nanotechnology research and industry area, developed countries have alwaysattached great importance to nanometer geometric quantity metrology research. In China, currently we have also successfully built several micro/nanometer geometric quantity measurement standard devices, which preliminarily established our nation′s nanometer standard traceability framework. The paper reviews the micro/nanometer measurement technologies and measurement standard devices in China, and discusses micro/nanometer metrology′s development for future.

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高思田,李琪,施玉书,李伟,黄鹭.我国微纳几何量计量技术的研究进展[J].仪器仪表学报,2017,38(8):1822-1829

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  • 在线发布日期: 2017-09-04
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