韩亚倩,赵美蓉,刘明,孙培元,宋乐.基于静电力的可溯源微悬臂梁刚度标定方法[J].仪器仪表学报,2017,38(6):1466-1473
基于静电力的可溯源微悬臂梁刚度标定方法
Traceable calibration method of cantilever stiffness based on the principle of electrostatic force
  
DOI:
中文关键词:  微纳力值  微悬臂梁  刚度标定  不确定度
英文关键词:micro nano tiny force  microcantilever beam  stiffness calibration  uncertainty
基金项目:天津市自然科学基金(17JCYBJC19000)、天津大学自主创新基金(2015XRG 0031,2017XZC 0051)项目资助
作者单位
韩亚倩 天津大学 精密测试技术及仪器国家重点实验室天津300072 
赵美蓉 天津大学 精密测试技术及仪器国家重点实验室天津300072 
刘明  
孙培元 天津大学 精密测试技术及仪器国家重点实验室天津300072 
宋乐 天津大学 精密测试技术及仪器国家重点实验室天津300072 
AuthorInstitution
Han Yaqian State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072,China 
Zhao Meirong State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072,China 
Liu Ming Tianjin Metrological Supervision and Detection Research Institute, Tianjin University, Tianjin 300192, China 
Sun Peiyuan State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072,China 
Song Le State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072,China 
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中文摘要:
      许多研究机构都建立了微纳力值测量系统,并达到了非常高的测量精度。但是,对微纳力值的传递却很少研究。采用无源悬臂梁作为微纳力值传递标准,提出基于静电力原理的“类参考梁法”悬臂梁刚度测量方法。该方法可准确且便捷地测量悬臂梁刚度,并将其溯源至长度、电压、电容等国际单位(SI)。应用类参考梁法,对刚度范围在1.45 ~ 91 N/m的悬臂梁刚度进行测试,相对方差均小于0.6%,结果表明,类参考梁法具有很好的稳定性。许多因素将影响测量结果,对导致测量误差的因素进行逐一分析。类参考梁法悬臂梁刚度测量合成不确定度低于5%,表明该方法具有可行性。类参考梁法有效改善了悬臂梁刚度测试的不确定度,在AFM高精度微纳力值测量中具有重要的意义。
英文摘要:
      Lot of micro nano force measurement systems are set up and very high measurement accuracy is obtained. However, transferring of micro nano force value is rarely studied. Using the passive cantilever as a transferred standard of micro nano force value, 'analogous reference cantilever method' is presented on the basis of the principle of electrostatic force. The cantilever stiffness can be accurately and conveniently measured and be traced to the international unit (SI) such as displacement, voltage and capacitance. Utilized 'analogous reference cantilever method', the cantilever with normal stiffness 1.45 ~ 91 N/m is test, the relative variance is less than 0.6%, the results show that the analogous reference cantilever method has good stability. The factors affected the measured results are analyzed experimentally or theoretically. Combined measurement uncertainty of 'analogous reference cantilever method' to measure the stiffness of cantilever is less than 5%, which shows the feasibility of the proposed method. 'Analogous reference cantilever method' effectively improves the uncertainty of cantilever stiffness test, and indicates significance in the high precision micro nano force value measurement of AFM.
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