罗哉,刘晖,田焜,李冬.关节臂式坐标测量机测量力误差分析及补偿[J].仪器仪表学报,2017,38(5):1159-1167
关节臂式坐标测量机测量力误差分析及补偿
Error analysis and compensation of the measuring force of the articulated arm coordinate measuring machine
  
DOI:
中文关键词:  关节臂式坐标测量机  测量力  测杆弯曲变形  误差补偿
英文关键词:articulated arm coordinate measuring machine (AACMM)  measuring force  bending model of rod  error compensation
基金项目:国家自然科学基金(51675499,51405463)、浙江省自然科学基金(LY15E050013)项目资助
作者单位
罗哉 中国计量大学计量测试工程学院杭州 310018 
刘晖 中国计量大学计量测试工程学院杭州 310018 
田焜 中国计量大学计量测试工程学院杭州 310018 
李冬 中国计量大学计量测试工程学院杭州 310018 
AuthorInstitution
Luo Zai College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China 
Liu Hui College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China 
Tian Kun College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China 
Li Dong College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China 
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中文摘要:
      针对接触测量力对关节臂式坐标测量机(AACMM)测量精度的影响展开研究。对测量力引起的长度测量误差进行理论和实验分析,得到测头与被测件的局部变形、测杆的弯曲变形是影响关节臂式坐标测量机测头精度的主要因素。建立了关节臂式坐标测量机测头与被测件的局部变形、测杆的弯曲变形的数学模型,并对测量结果进行了测量力误差补偿。实验结果研究表明,测量力引起的误差对接触式关节臂式坐标测量机测量精度影响很大。通过本研究成果,可在很大程度上补偿测量力引起的误差:平均长度测量误差降低82%左右,最大误差降低约47 μm,有效地提高了关节臂式坐标测量机的测量精度。
英文摘要:
      Measuring accuracy of AACMM based on measuring force is focused in this work. The error of length measurement caused by measuring force is analyzed theoretically and experimentally. The local deformation of the probe and the measured object and the bending deformation of the measuring rod are the main factors affecting the accuracy of AACMM. The mathematical models of the local deformation and the bending deformation of the rod are established, with which the measuring results compensated with force error. Results show the error caused by measuring force can be compensated to a great extent: the average length measurement error is reduced about 82%, the maximum error is reduced by about 47um, which effectively improves the precision of AACCM.
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