基于分时复用反射电极结构的高精度绝对式时栅角位移传感器
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TH712

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国家自然科学基金(51935004,51435002)、重庆市教委高校创新团队项目(CXTDX201601029)资助


High precision absolute timegrating angular displacement sensor using time division multiplex access scheme with reflective electrode structure
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    摘要:

    提出了一种基于分时复用反射电极结构的高精度绝对式时栅角位移传感器。以增量式时栅传感器为基础,将单对极与多对极相结合,整周多对极作为精确测量部分实现高精度,整周单对极作为粗略测量部分实现绝对定位。提出了一种分时复用反射电极结构,粗测部分和精测部分共用一组反射电极和接收电极,因此结构更加紧凑,便于小型化,同时动子无需引线,应用环境更广。通过分时间段对粗测部分和精测部分施加激励信号,并把不工作的电极接地,可以有效消除粗测部分和精测部分之间的串扰,保证测量精度。采用PCB技术制造了外径Φ=60 mm,内径Φ=26 mm的传感器样机。通过理论分析和结构优化,最终实验结果表明传感器的测量精度达到了±12″。

    Abstract:

    In this paper, a high precision absolute timegrating angular displacement sensor using division multiplex access scheme with reflective electrode structure is designed. Based on the incremental timegrating sensor, the singlepole and multipole are combined. The multipole is used as the precise measurement component for high precision, and the singlepole is used as the rough measurement component that achieves absolute positioning. The timedivision multiplex access scheme with reflective electrode structure is proposed. The rough measurement component and the precise measurement component share a set of reflective electrodes and receiving electrodes. In this way, the structure is more compact and better miniaturization. Meanwhile, the rotor does not need lead wires and has more application scenarios. To eliminate the crosstalk between the rough and the precise measurement components, the excitation signal is added to the precise measurement component and the rough measurement component in different time, and grounding the nonworking electrode. A sensor prototype with the 60 mm outer diameter and the 26 mm inner diameter is designed using PCB technology. Through theoretical analysis and structural optimization, experimental results show that the measurement accuracy can achieve ±12″.

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刘小康,李昌伟,彭凯,于治成,冯济琴.基于分时复用反射电极结构的高精度绝对式时栅角位移传感器[J].仪器仪表学报,2019,40(11):23-31

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  • 在线发布日期: 2022-01-08
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