C/SiC复合材料表面高温瞬态温度传感器的研究
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TH811

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国家自然科学基金(51575074)项目资助


Study on high temperature transient temperature sensor on C/SiC composite surface
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    摘要:

    针对C/SiC复合材料制造的航空发动机热端部件瞬时表面温度监测困难的问题,研究了一种C/SiC复合材料瞬时表面温度测量方法。采用磁控溅射法结合电镀工艺在C/SiC复合材料表面沉积了NiCrZrO2复合过渡层,采用磁控溅射法在NiCrZrO2复合过渡层上依次制备了SiO2绝缘膜、NiCr/NiSi薄膜热电偶和SiO2保护膜。对不同厚度SiO2绝缘膜的绝缘性能进行研究,结果表明3 μm 厚的SiO2薄膜绝缘电阻值可达164×109 Ω。对传感器静态性能的实验研究结果表明,在50~600℃,塞贝克系数为421 μV/℃,非线性误差152%。用理论计算与实验结合的方式对传感器的动态性能进行了研究,结果表明,传感器的动态响应时间在微秒级,可实现瞬态温度测试。对传感器进行测温实验,结果表明传感器能满足室温~600℃范围内瞬态温度检测的需求。

    Abstract:

    Theinstantaneous surface temperaturemonitoringis always challenging for the aeroengine hot components composed of C/SiC composite materials.An measurement method of instantaneous surface temperature monitoring is studied for the aeroengine hot components composed of C/SiC composite materials. The NiCrZrO2 composite transition layer isdeposited on the surface of C/SiC composite by magnetron sputtering and electroplating.Insulating film SiO2, NiCr/NiSithin film thermocouple and SiO2 protective filmareprepared sequentially on the NiCrZrO2composite metal transition layer on the surface of C/SiC composite prepared by magnetron sputtering.The insulation properties of SiO2 insulating films with different thicknesses areinvestigated. The results indicatethat the insulation resistance of SiO2 films with a thickness of 3 μm is about 164×109 Ω. The experimental results of the static performance of the sensor show that the Seebeck coefficient is 421 μV/℃ and the nonlinear error is 152% in the range of 50~600℃. The dynamic performance of the sensor is studied by the combination of theoretical calculation and experiment. The results show that the dynamic response time of the sensor is in the microsecond range, which can realize the transient temperature test. The temperature measurement experiment shows that the sensor can meet the requirements of transient temperature detection ranged from room temperature to 600℃.

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崔云先,杨琮,薛生俊,殷俊伟,杜鹏. C/SiC复合材料表面高温瞬态温度传感器的研究[J].仪器仪表学报,2019,40(3):163-171

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  • 在线发布日期: 2022-01-14
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