光纤Fizeau腔超快爆炸冲击波压力传感器
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光纤传感技术与网络国家工程研究中心武汉430070

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TH7

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Optical fiber Fizeau cavity ultrafast explosive shock wave pressure sensor
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National Engineering Research Center for Optical Fiber Sensing Technology and Networks, Wuhan 430070, China

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    摘要:

    为解决传统机电式与压电压阻式传感器在爆炸冲击波等极端电磁环境下易受干扰、响应滞后及上升沿难以捕捉的问题,提出并制备了基于法布里-珀罗(F-P)干涉原理的全石英Fizeau腔光纤微型动态压力传感器,该传感器兼具高灵敏度、高频响与高空间分辨率特性。其传感单元由直径125 μm的单模光纤、石英毛细玻璃管及无芯光纤熔接构成,通过限长研磨与40%HF化学腐蚀工艺,将无芯光纤压力敏感膜片厚度精确至2~3 μm,实现近似理想双光束正弦干涉输出。为实现瞬态压力的高精度反演,采用三波长光源激励与任意确定性相位间隔的被动零差解调技术,实时提取冲击载荷下腔长变化引发的干涉相位偏移;结合三通道电压归一化与相位跳变补偿算法,有效抑制插入损耗差异与量化噪声对测量精度的影响。静态标定实验表明,传感器在量程范围内均处于弹性工作区,其中0~60 MPa量程线性度达2.23% FS、重复性优于2%、回程误差<0.1%。激波管动态测试结果显示,当高速光电探测器谐振频率设置为20 MHz、响应时间为8 ns时,传感器系统动态响应时间<50 ns,可准确重构冲击波压力—时间波形。该传感器兼具微尺度探测与高频响特性,适用于爆炸冲击及强激光诱导近场等离子体冲击等极端工况下的瞬态压力测试,并可在强电磁与高冲击条件下保持稳定输出,具有一定工程应用价值。

    Abstract:

    To address the problems that traditional electromechanical and piezoelectric/piezoresistive sensors are susceptible to interference in extreme electromagnetic environments such as explosive shock waves, exhibit response lag, and have difficulty capturing the rising edge, this paper proposes and fabricates an all-silica Fizeau-cavity optical fiber miniature dynamic pressure sensor based on the Fabry-Pérot (F-P) interference principle. The sensor integrates the characteristics of high sensitivity, high frequency response, and high spatial resolution. Its sensing unit is formed by fusion splicing a 125 μm single-mode fiber, a silica capillary tube, and a coreless fiber. By length-limited grinding and 40% HF chemical etching, the thickness of the coreless-fiber pressure-sensitive diaphragm is precisely controlled to 2~3 μm, achieving an approximately ideal two-beam sinusoidal interference output. To enable high-precision inversion of transient pressure, a three-wavelength light source excitation scheme and a passive homodyne demodulation technique with arbitrary deterministic phase spacing are adopted to extract, in real time, the interferometric phase shift induced by cavity length variations under shock loading. In combination with three-channel voltage normalization and a phase-jump compensation algorithm, the influence of insertion-loss differences and quantization noise on measurement accuracy is effectively suppressed. Static calibration experiments show that the sensor operates within the elastic regime over the entire measurement range; within 0~60 MPa, the full-scale nonlinearity reaches 2.23%, the repeatability is better than 2%, and the hysteresis error is less than 0.1%. Shock-tube dynamic test results indicate that when the resonance frequency of the high-speed photodetector is set to 20 MHz and the response time is 8 ns, the dynamic response time of the sensor system is less than 50 ns, which allows for the accurate reconstruction of the shock-wave pressure-time waveform. With the merits of microscale sensing and high-frequency response, the sensor is suitable for transient pressure measurements under extreme conditions such as explosive impacts and intense laser-induced near-field plasma shocks, and it can maintain stable output under strong electromagnetic and high-shock conditions, thus exhibiting considerable engineering application value.

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贺达,王俊杰,朱亚凯,熊俊杰,刘腾.光纤Fizeau腔超快爆炸冲击波压力传感器[J].仪器仪表学报,2026,47(2):50-61

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  • 在线发布日期: 2026-04-08
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