面向导轨轮廓测量的多源误差建模与补偿方法研究
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1.北京交通大学机械与电子控制工程学院北京100044; 2.雁栖湖基础制造技术研究院(北京)有限公司 北京100044; 3.国家市场监督管理总局重点实验室(工业母机功能部件性能测试与评价)北京100044

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TH161+.24

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中国机械总院技术发展基金(J242202Y)、国家自然科学基金(52475507)、北京交通大学基础研究基金(2024JBMC017)项目资助


Research on multi-source error modeling and compensation method for guide rail profile measurement
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1.College of Mechanical and Electronic Control Engineering, Beijing Jiaotong University, Beijing 100044, China; 2.Yanqi Lake Institute of Basic Manufacturing Technology Research Co., Ltd., Beijing 100044, China; 3.Key Laboratory of Machine Tool Functional Parts Performance Test and Evaluation, State Administration for Market Regulation, Beijing 100044, China

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    摘要:

    针对超精密加工中滚动直线导轨全行程、多参数复合测量的精度需求,研究了融合线结构光传感技术的导轨轮廓几何误差补偿方法。针对进给轴直线度误差与传感器安装误差的耦合导致测量数据畸变的问题,基于多体系统理论构建了包含三维位置误差、姿态误差及传感器三轴安装偏角误差的统一数学模型,将进给轴视为“运动体”、传感器视为“末端执行体”,明确各类误差的非线性耦合机制。设计了基于四象限探测器与线激光传感器的误差辨识方法,通过二次多项式拟合分离进给轴位置误差与姿态误差,基于几何投影关系实现传感器安装偏角的提取,并构建联合补偿矩阵对测量坐标系进行修正补偿。搭建了导轨几何轮廓仪实验平台,在800 mm行程内进行了直线度误差辨识验证,在0.5°~2.0°偏角范围内进行了传感器安装误差辨识验证,两种方法辨识误差均小于3.5%,验证了辨识方法在导轨轮廓测量中的准确性;对比无补偿、单误差补偿及联合补偿4种实验方案,结果表明,联合补偿后导轨轮廓测量偏差均值从6.229 μm降至2.301 μm,偏差平均降低36.9%,标准差降低22.8%,最大偏差降低20.8%,全行程测量精度显著提升,验证了多体系统误差模型及联合补偿矩阵的有效性,为超精密加工装备的高精度检测提供了理论与技术支撑。

    Abstract:

    To meet the precision requirements for full-stroke, multi-parameter composite measurement of rolling linear guides in ultra-precision machining, this paper investigates a geometric error compensation method for guide rail contours based on fused line-structured light sensing technology. To address the distortion in measurement data caused by the coupling of feed-axis straightness errors and sensor installation deviations, a unified mathematical model incorporating three-dimensional position error, attitude error, and sensor three-axis installation deviation is established based on multi-body system theory. The feed axis is treated as the "moving body" and the sensor as the "end effector," and the nonlinear coupling mechanism of various errors is clarified. An error identification method using a quadrant detector and a linear laser sensor is designed. Feed-axis position and attitude errors are separated through quadratic polynomial fitting, and sensor installation deviation angles are extracted based on geometric projection relationships. A joint compensation matrix is then constructed to correct and compensate the measurement coordinate system. An experimental platform for the guide rail geometric contour instrument is established. Straightness error identification is verified over an 800 mm stroke, and sensor installation deviation is validated within a 0.5°~2.0° deflection range. Identification errors for both methods are below 3.5%, confirming the accuracy of the proposed method for guide rail contour measurement. Comparative experiments under no compensation, single-error compensation, and joint compensation scenarios demonstrate that, after joint compensation, the average deviation of guide rail profile measurement decreases from 6.229 μm to 2.301 μm, with the mean deviation reduced by 36.9%, the standard deviation by 22.8%, and the maximum deviation by 20.8%. Full-stroke measurement accuracy is significantly improved, verifying the effectiveness of the multi-body system error model and the joint compensation matrix. The proposed method provides a theoretical and technical foundation for high-precision inspection of ultra-precision machining equipment.

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王海同,马紫瑞,李金峰,张泽阳.面向导轨轮廓测量的多源误差建模与补偿方法研究[J].仪器仪表学报,2026,47(2):211-221

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  • 在线发布日期: 2026-04-08
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