音叉谐振微陀螺机电一体化建模与优化设计
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大连理工大学机械工程学院大连116024

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TH73

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国家自然科学基金项目(52575612)、国家自然科学基金项目(12302255)资助


Mechatronic modeling and optimization design of tuning fork resonant MEMS gyroscope
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School of Mechanical Engineering, Dalian University of Technology,Dalian 116024, China

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    摘要:

    针对微机电(MEMS)陀螺敏感结构参数与接口电路参数相互耦合、输出信噪比(SNR)难以提升的问题,提出了全解耦音叉谐振微陀螺机电一体化建模与力-电参数协同优化设计方法。建立了双质量反相驱动与差分检测的全解耦微结构力电耦合动力学模型和电容检测接口电路噪声计算模型,推导了解耦梁等效刚度与结构模态频率的解析表达式,分析了结构尺寸参数和电路阻抗参数对信号噪声的影响规律,并以结构关键梁尺寸、接口电路电容/电阻组合参数为优化变量,以提升输出信号信噪比为优化目标,采用移动渐近线算法(MMA)对微陀螺系统机电参量进行协同优化,实现信噪比由17.70 dB至37.45 dB的性能提升。根据优化结果设计印制电路板(PCB)对微陀螺样件进行性能参数测试与实车路跑验证,结果表明,所研制的微陀螺驱动模态频率和检测模态频率分别为8 750.47和8 828.63 Hz,与理论计算相比误差约为2.9%;利用半带宽法计算微陀螺驱动模态和检测模态品质因子(Q值)分别为1 008.1和1 027.8;采用单轴转台测得微陀螺灵敏度为0.486 9 mV/(°/s),信噪比为36.31 dB,与理论计算相比误差约为3%;采用Allan标准差计算得到微陀螺零偏不稳定性为28.26(°)/h;在车辆转向与环岛绕行等典型动态工况下,其角速度输出与高精度参考传感器保持良好一致性,从系统应用角度验证了所提出的机电一体化协同优化设计方法的有效性。

    Abstract:

    To address the strong coupling between the structural parameters of micro-electromechanical systems (MEMS) gyroscope and the electrical parameters of capacitive readout circuit, which limits the improvement of the output signal-to-noise ratio (SNR), this paper proposes a mechatronic integrated modeling and force-electrical co-optimization approach for a fully decoupled tuning-fork resonant MEMS gyroscope. An electromechanically-coupled dynamic model of the fully decoupled microstructure with dual-mass anti-phase drive and differential sensing, and a noise model of the capacitive readout interface circuit, are established. Analytical expressions for the equivalent stiffness of the decoupling beams and the structural modal frequencies are derived. The influence of structural dimensional parameters and circuit impedance parameters on signal noise is systematically analyzed. The critical beam dimensions of the microstructure and the capacitance/resistance combinations of the capacitive readout circuit serve as optimization variables, with the SNR as the optimization objective. The method of moving asymptotes (MMA) is employed to perform co-optimization of the electromechanical parameters of the MEMS gyroscope system, achieving an SNR improvement from 17.70 to 37.45 dB. Based on the optimized results, a printed circuit board (PCB) is designed for performance characterization and on-vehicle road test of the fabricated MEMS gyroscope. Experimental results show that the drive-mode and sense-mode resonant frequencies are 8 750.47 and 8 828.63 Hz, respectively, with errors of approximately 2.9% relative to theoretical predictions. Using the half-power bandwidth method, the quality factors (Q) of the drive and sense modes are measured to be 1 008.1 and 1 027.8, respectively. Single-axis rate-table tests yield a sensitivity of 0.486 9 mV/(°/s) and an SNR of 36.31 dB, with an error of about 3% relative to theoretical values. The zero-bias instability calculated by Allan deviation is 28.26(°)/h. Under typical dynamic driving conditions, including vehicle turning and roundabout maneuvering, the angular rate output exhibits good consistency with a high-precision reference gyroscope, thereby validating the effectiveness of the proposed electromechanical co-optimization design method from a system-level application perspective.

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东泽源,尚文海,赵剑,刘蓬勃,霍慧.音叉谐振微陀螺机电一体化建模与优化设计[J].仪器仪表学报,2026,47(2):62-73

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  • 在线发布日期: 2026-04-08
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