一种基于双向热膨胀流的MEMS陀螺研究
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北京信息科技大学传感器重点实验室北京100000

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TH703

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国家自然科学基金资助项目(61771060);北京市教育委员会科研计划项目资助(KZ20231123221) ;北京市新世纪百千万人才工程培养资助项目(2019A20);现代测控技术教育部重点实验室资助(2024202101);北京信息科技大学北京市传感器重点实验室资助(2024202108)


A study of a MEMS gyro based on bidirectional thermal expansion flow
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Key Laboratory of Sensors, Beijing Information Science and Technology University, Beijing 100000, China

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    摘要:

    提出并验证了一种基于双向热膨胀流原理的MEMS陀螺,陀螺通过加热器的瞬时温度变化产生气流,进而导致热敏电阻的温变,并转换成相应的输出电压,最终实现对Z轴角速度的准确检测。为了进一步提高陀螺性能,降低交叉耦合,同时优化制备工艺,需对所设计的陀螺结构进行优化设计。首先,需借助COMSOL Multiphysics仿真软件,针对敏感元件的位置分布、摆放方式以及单、双向热膨胀流等因素对灵敏度的影响展开深入探究。通过系统性的仿真分析,明确最优的敏感元件摆放位置范围,确定平行摆放方式为最佳选择。其次,从理论与仿真结果两方面论证,双向热膨胀流能够实现更高的输出灵敏度,并且在抑制耦合方面表现更为出色。最后基于以上研究,对该MEMS陀螺进行流片制备,并所对制作的基于双向热膨胀流的MEMS陀螺进行性能测试并分析陀螺的不足。测试结果表明,在加热器的驱动信号为2.5 V、50%占空比、10 Hz方波的情况下,该陀螺能够在±600°/s范围内检测角速率,灵敏度为3.04 mV/(°·s-1) ,非线性度为7.09%。实验结果与数值模拟相符,该陀螺具有灵敏度高、抑制交叉耦合和工艺简单等特点,可用于电子设备、航天和医学仪器等领域。

    Abstract:

    A MEMS gyro based on the principle of bi-directional thermal expansion flow is proposed and validated. The gyro generates airflow through the instantaneous temperature change of the heater, which induces a corresponding temperature change in a thermistor. This temperature variation is then converted into an output voltage, enabling accurate detection of angular velocity along the Z-axis. In order to further improve the performance of the gyroscope, reduce the cross-coupling, and optimize the preparation process, structural design optimization is necessary. COMSOL Multiphysics simulation software is used to explore the influence of factors such as the positional distribution of the sensitive components, the placement mode, and the uni-directional and bi-directional thermal expansion flows on the sensitivity. Through systematic simulation analysis, the optimal placement range of sensitive elements is clarified, with the parallel placement determined to be determined to be the most effective configuration. Furthermore, both theoretical and simulation results demonstrate that the bidirectional thermal expansion flow realizes higher output sensitivity and superior cross-coupling suppression compared to its uni-directional counterpart. Finally, based on the above findings, a MEMS gyro is prepared and its performance is experimentally evaluated. The test results show that the gyro is capable of detecting the angular rate in the range of ±600°/s with a sensitivity of 3.04 mV/(°·s-1) and a nonlinearity of 7.09%, under a heater drive signal of 2.5 V, 50% duty cycle, and 10 Hz square wave. The experimental results are consistent with the numerical simulations, confirming that the gyro offers high sensitivity, effective cross-coupling suppression, and a simplified fabrication process. These characteristics make it suitable for applications electronic devices, aerospace and medical instruments.

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马炫霖,朴林华,刘珺宇.一种基于双向热膨胀流的MEMS陀螺研究[J].仪器仪表学报,2025,46(6):32-39

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  • 在线发布日期: 2025-09-09
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