面向水滴蒸发检测的纳瓦级柔性微热量计
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合肥工业大学微电子学院合肥230009

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TH79

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国家自然科学基金青年科学基金(62201187)项目资助


Flexible nanowatt microcalorimeter for water droplet evaporation detection
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School of Microelectronics, Hefei University of Technology, Hefei 230009, China

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    摘要:

    微热量计因其样品需求量少、检测速度快、测量精度高等显著优势,在细胞代谢动态监测、生物分子相互作用、药物-受体结合热分析等领域具有不可替代的作用。然而,现有高分辨率微热量计普遍采用微机电系统工艺,通过复杂的光刻、刻蚀及真空封装技术制备微型反应腔与传感器阵列,导致成本高且制备周期长,制约其在低成本、高通量检测场景中的推广应用。为此,设计了一种基于柔性印刷电路工艺的开放式微热量计芯片。该芯片以柔性聚酰亚胺薄膜为基底,集成表面贴装热敏电阻作为温度传感单元,结合开放式反应腔设计与差分信号处理电路,在常压环境下实现了15.4 nW的功率分辨率和48.44 μK的温度分辨率。基于该热反应过程监控系统平台,对不同体积水滴的蒸发过程进行实时热监测,针对0.4 μL水滴,测得其蒸发焓为960.9 mJ,与理论值(979.63 mJ)偏差仅1.91%,充分证明了系统的高可靠性与抗干扰特性。设计的柔性微热量计具有制备工艺简单、成本低廉及可批量生产的优点,为单细胞代谢热动力学、纳米材料热容表征等研究提供了高性价比工具,并在便携式生化检测、高通量药物筛选及工业过程监控等领域展现出广阔应用前景,有望推动精准医疗、生物制药及绿色化工技术的创新发展。

    Abstract:

    Microcalorimeters play a critical role in biomedical and chemical research, such as dynamic monitoring of cellular metabolism, biomolecular interactions, and drug-receptor binding heat analysis, owing to their advantages of minimal sample requirements, rapid detection, and high precision. However, existing high-resolution microcalorimeters predominantly rely on micro-electro-mechanical systems processes, which involve complex photolithography, etching, and vacuum packaging techniques to fabricate microreactors and sensor arrays. These processes result in high costs and prolonged production cycles, limiting their adoption in low-cost, high-throughput scenarios. To address these challenges, this study presents an open-architecture microcalorimeter chip based on flexible printed circuit technology. The chip utilizes a flexible polyimide film substrate, integrates surface-mounted thermistors as temperaturesensing units, and combines an open reaction chamber design with differential signal processing circuitry. The device achieves a power resolution of 15.4 nW and a temperature resolution of 48.44 μK under ambient pressure. A thermal reaction monitoring system was developed to perform real-time thermal detection of water droplet evaporation processes. For a 0.4 μL droplet, the measured evaporation enthalpy was 960.9 mJ, deviating by only 1.91% from the theoretical value (979.63 mJ), validating the system′s high reliability and anti-interference capability. The proposed flexible microcalorimeter features simple fabrication, low cost, and scalable production, offering a cost-effective solution for fundamental studies in single-cell metabolic thermodynamics and nanomaterial heat capacity characterization. Furthermore, it demonstrates broad application potential in portable biochemical detection, high-throughput drug screening, and industrial process monitoring, with promising implications for advancing precision medicine, biopharmaceuticals, and green chemical technologies.

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曾鹏,杨小平,姬晨晨,李子恒,冯建国.面向水滴蒸发检测的纳瓦级柔性微热量计[J].仪器仪表学报,2025,46(6):40-47

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  • 在线发布日期: 2025-09-09
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