基于视觉测量的微探针跨尺度沉积方法
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1.南通大学机械工程学院南通226019; 2.西安交通大学机械工程学院西安710049

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TH89

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国家自然科学基金面上项目(52175515)、江苏省研究生科研与实践创新项目(KYCX24-3553)资助


A cross-scale deposition method for micro-probe based on visual measurement
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1.School of Mechanical Engineering, Nantong University, Nantong 226019, China; 2.School of Mechanical Engineering, Xi′an Jiaotong University, Xi′an 710049, China

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    摘要:

    弯月形液滴限制电化学沉积技术以其低成本、高加工精度的优势在微纳尺度的结构制造中倍受青睐,但压电实验平台有限的位移行程限制了其在大尺度制造场景中的应用。据此,提出了一种基于视觉检测的跨尺度连续沉积法。该方法首先在现有MCED设备的基础上,集成了显微相机与三轴移动装置,搭建了基于显微视觉测量的探针粗调节与平台精调节相结合的跨尺度连续沉积平台;其次,以微纳平台的基底预设等间距位移为基准,利用图像灰度特征解算基底位移量对应的像素位移量,并在此基础上构建了基于Adam算法优化的梯度下降模型,建立“物-像”距离映射关系,实现了基于单相机图像的高精度沉积物与探针在线定位与测量;然后,利用视觉反馈控制,完成了探针位置与沉积位置间的高精度对准与沉积定位,实现了MCED平台的跨尺度连续沉积;最后,使用共聚焦显微镜测量分析了分段沉积物的长度及连接点的沉积质量。结果表明:基于视觉测量反馈的玻璃微探针跨尺度沉积方法,在保证沉积质量及线段端点沉积精度的基础上能够实现80 μm行程压电平台的毫米级尺度线段的沉积,且沉积长度误差<3%,此方法为大尺度精密制造提供了新方案。

    Abstract:

    Meniscus-confined electrodeposition (MCED) technology has gained considerable attention in micro/nanoscale structure fabrication due to its low cost and high precision. However, the limited displacement range of piezoelectric stages restricts its applicability in large-scale manufacturing scenarios. To overcome this limitation, a cross-scale continuous deposition method based on visual inspection is proposed. This approach integrates a microscope camera and a threeaxis motion system into existing MCED equipment, creating a cross-scale continuous deposition platform that combines coarse probe adjustments with fine platform positioning, guided by microscopic vision measurements. Next, by using predefined equidistant displacements of the micro/nano platform as a reference, pixel shifts corresponding to these displacements are calculated through image grayscale analysis. This data is then used to develop an Adam-optimized gradient descent model, which establishes an “object-to-image” distance mapping relationship, enabling high-precision positioning and measurement of the deposited material and the probe from a single camera image. Visual feedback control is employed to achieve precise alignment and deposition positioning, facilitating cross-scale continuous deposition on the MCED platform. Finally, a confocal microscope is used to measure and analyze the length and junction quality of the deposits. The results demonstrate that this method enables the deposition of millimeter-scale line segments using an 80 μm-range piezoelectric stage, with deposition length errors below 3% , while maintaining high quality and precision at the segment endpoints. This approach offers a promising solution for large-scale precision manufacturing.

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邢强,万晗驰,杨宝权,庄健,徐海黎.基于视觉测量的微探针跨尺度沉积方法[J].仪器仪表学报,2025,46(4):228-239

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  • 在线发布日期: 2025-06-23
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