基于模态局部化效应的高分辨力微型电场传感器
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1.北京信息科技大学理学院北京100192; 2.北京信息科技大学北京市传感器重点实验室北京100192; 3.中国科学院空天信息创新研究院传感器技术全国重点实验室北京100190

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TH73

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国家自然科学基金(62101054,62031025)、传感技术联合国家重点实验室开放研究基金(SKT2201)、北京市教育委员会科学研究计划(KM202211232005)、北京市科技计划(Z231100006623012)、北京信息科技大学“勤信人才”培育计划(QXTCPB202409)项目资助


High resolution micro electric field sensor based on mode localization effect
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1.School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China; 2.Beijing Key Laboratory for Sensors, Beijing Information Science and Technology University, Beijing 100192, China; 3.State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China

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    摘要:

    模态局部化效应是提高MEMS物理量传感器灵敏度和分辨力的有效途径。然而,由于没有深入研究电场引入方法,导致目前已报道的模态局部化MEMS电场传感器的分辨力没有达到弱电场探测需求。为此,基于模态局部化效应提出一种高分辨力MEMS电场传感器。传感器主要由电场引入结构、三自由度弱耦合谐振系统及封装基座构成,采用浮动分立式高分辨力电场引入结构设计方案,建立理论模型优化结构参数;以三自由度弱耦合谐振器振幅比的算术平方根作为电场传感器的输出,解决非线性输出问题;基于有限元仿真,分析了传感器的振动模态,并研究了电场感应电极的旋转对电场测量带来的影响。在真空条件下对已制备的电场传感器样片进行测试,结果表明:在 0~7 kV/m待测电场范围内,传感器的灵敏度为0.068 /(kV·m-1),本底噪声为0.0121 (V·m-1)/Hz;传感器的分辨力优于0.4 V/m,是目前国内外报道的最好水平。此外,在待测电场中旋转电场感应电极,对其灵敏度进行测试;并对传感器的三自由度弱耦合谐振器的模态局部化现象进行深入研究,发现可以通过驱动和扰动不同谐振器控制模态局部化现象发生在特定的谐振器和特定的模态上。

    Abstract:

    The mode localization effect is a proven approach for enhancing the sensitivity and resolution of MEMS physical quantity sensors. However, the lack of in-depth research on electric field introduction methods has limited the resolution of currently reported mode-localized electric field microsensors, preventing them from meeting the requirements for weak electric field detection. This study proposes a high-resolution electric field microsensor leveraging mode localization. The sensor consists of an electric field introduction structure, a three-degree-of-freedom weakly coupled resonator, and a packaging base. A floating and discrete highresolution electric field introduction design is adopted, supported by a theoretical model for optimizing structural parameters. The arithmetic square root of the amplitude ratio of the weakly coupled resonator is used as the output of the sensor to address nonlinear output challenges. Finite element simulations are utilized to analyze the vibration modes of the sensor and investigate the impact of the rotation of the electric field induction electrode on measurement accuracy. Experimental testing of the fabricated sensor under vacuum conditions demonstrates a sensitivity of 0.068 /(kV·m-1) and a background noise level of 0.012 1 (V·m-1)/Hz within the measured electric field range of 0~7 kV/m. The sensor achieves a resolution better than 0.4 V/m, representing the highest level reported domestically and internationally to date. Additionally, the sensitivity of the electric field induction electrode is tested by rotating it within the measured electric field; An in-depth study of the mode localization phenomenon in the resonator revealed that this phenomenon can be precisely controlled by selectively exciting and perturbing specific resonators to induce localization in targeted modes.

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王若航,杨鹏飞,顾羽,李晓南,彭春荣.基于模态局部化效应的高分辨力微型电场传感器[J].仪器仪表学报,2025,46(4):65-76

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  • 在线发布日期: 2025-06-23
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