基于双拟合优化的聚焦深度三维形貌测量方法
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TH76

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国家重点研发计划 (2018YFA0703304)、国家杰出青年科学基金 (52125504)、国家自然科学基金集成项目(92148031)资助


Shape from focus 3D topography measurement method based on dual-fitting optimization
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    摘要:

    聚焦深度法广泛地应用于小尺寸零构件的三维形貌测量。 针对聚焦评价曲线多存在噪声导致三维形貌测量的精度下 降,且效率受图像序列数目和聚焦评价算法限制的难题,通过结合双拟合优化理论与聚焦单峰性评价指标提出了一种基于自适 应权重的聚焦极值搜寻方法,并进一步基于三次多项式二次插值算法和多级中值混合滤波优化深度信息。 实验结果表明,方法 对仿真图像数据的均方根误差(RMSE)较高斯拟合和多项式拟合分别降低了 19. 08% 、17. 32% , 对球栅阵列封装 (BGA) 图像 中受噪声干扰较大的区域仍具三维分辨能力,同时对钻削刀具进行了测量,提出的方法在 50% 的图像序列数目和图像分辨下 RMSE 仍降低了 77. 8% 、62. 6% ,有效减少了聚焦曲线噪声对测量结果影响的同时提升了三维测量的效率。

    Abstract:

    Shape from focus is a commonly-used method for measuring the three-dimensional topography of components with small size. However, the measurement accuracy is often affected by noise in the focus evaluation curve. Additionally, the efficiency is limited by both the number of image sequences and the focus evaluation algorithm. In this paper, an adaptive weighted focus extreme search method combining the theory of dual-fitting optimization and a focus unimodality evaluation index is proposed. Furthermore, a cubic polynomial quadratic interpolation algorithm is used for interpolation, and the depth information is optimized by a multi-level median blend filtering algorithm. Experimental results show that the proposed method reduces the RMSE of simulated image data by 19. 08% and 17. 32% compared to Gaussian fitting and polynomial fitting, and maintains three-dimensional resolution in regions with significant noise interference. At the same time, we also measured the drill bits. Results show that the proposed method reduces the RMSE by 77. 8% and 62. 6% even when the number of image sequences and image resolution are reduced by 50% , which effectively reduces the influence of measurement curve noise on measurement results and improves measurement efficiency.

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王文琪,刘 巍,刘 洋,程习康,张 洋.基于双拟合优化的聚焦深度三维形貌测量方法[J].仪器仪表学报,2023,44(11):30-38

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  • 在线发布日期: 2024-01-29
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