一种高灵敏度声表面波振动传感器的设计研究
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TH89

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国家自然科学基金(U1837209,52105594)、山西省基础研究计划( 20210302124274)、山西省高等学校科技创新计划( 2023L361)项目资助


Research on the design of a high-sensitivity surface acoustic wave vibration sensor
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    摘要:

    高温振动监测在故障诊断、设备维护等方面发挥重要作用,为此本文提出一种基于四端固支梁对称结构的硅酸镓镧 (LGS)声表面波(SAW)高温振动传感器,采用算法优化设计,可实现高灵敏度、宽频段等特性,耐温最高可达 800℃ ;构建四端 固支梁 SAW 振动传感器数学模型,分析其灵敏度与固有频率;建立传感器结构模型,并在 20℃ ~ 800℃内进行力学与电学仿真, 揭示传感器高温力学与电学性能变化规律。 结果表明,本传感器相比单一 SAW 谐振器结构,灵敏度提高约 7. 047 倍;在 20℃ ~ 800℃内,灵敏度随温度升高而增大,800℃时达到 9. 879 1×10 -6 / g;固有频率随温度升高而减小,800℃ 为 3 018. 4 Hz。 最 后通过实验初步验证了本设计方案的可行性,为 SAW 振动传感器优化设计与高温应用提供新的思路。

    Abstract:

    High-temperature vibration monitoring is essential for failure diagnosis and equipment maintenance. This paper presents a La3Ga5 SiO14(LGS) surface acoustic wave (SAW) high-temperature vibration sensor based on the symmetrical structure of four-end fixed beam, capable of withstanding temperatures up to 800℃ and providing high sensitivity and wide band by using an optimized algorithm. Then the mathematical model of SAW vibration sensor with a four-end fixed beam was constructed, and the sensitivity and natural frequency of the sensor were analyzed. Subsequently, the structural model of the sensor was established, and the mechanical and electrical simulations were carried out in the range of 20℃ ~800℃, which reveals the mechanical and electrical properties of the sensor at high temperature. The results show that the sensitivity of the proposed sensor in this study is about 7. 047 times higher than that of the sensor with single SAW resonator, and the sensitivity increases progressively with temperature at 20℃ ~800℃, reaching 9. 879 1 ×10 -6 / g at 800℃. The natural frequency decreases with temperature, showing 3 018. 4 Hz at 800℃ . Finally, the feasibility of the design was preliminarily verified by experiments, which provides a new idea for the optimization design and high-temperature application of SAW vibration sensor.

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张 娟,张 磊,程文华,马宏帅,谭秋林.一种高灵敏度声表面波振动传感器的设计研究[J].仪器仪表学报,2023,44(10):100-111

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  • 在线发布日期: 2024-01-25
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