Abstract:There is an urgent demand for high-performance sensors in the fields of aviation, aerospace, etc. Graphene materials, due to their excellent mechanical and electronic properties, are expected to further improve sensor performance and have attracted extensive research. Graphene resonators, as a new sensitive unit, have very high sensing sensitivity due to their extremely thin thickness. However, currently, the anti-interference ability and stability of graphene resonators at room temperature are generally poor. The antiinterference ability and stability of resonators are closely related to their quality factor. The low quality factor of graphene resonators at room temperature has become a key factor that restricts the performance improvement and application of graphene resonators. Improving the quality factor of graphene resonators has become an urgent research issue. This article focuses on the problem of low quality factor of graphene resonators at room temperature. By formulating an energy dissipation dilution theoretical model of graphene resonators, the energy dissipation distribution characteristics of graphene resonators are analyzed. Guided by the theoretical model of energy dissipation dilution, a new mechanism for suppressing energy dissipation in graphene resonators based on the phononic crystal soft support structure is proposed. Optimization design, preparation, and characteristic testing analysis of graphene phononic crystal resonators are carried out, which provides a new technical way for improving the quality factor of graphene resonators.