用于三维测量的双路点衍射干涉系统
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1.中国计量大学计量测试工程学院杭州310018;2.浙江大学电气工程学院杭州310027

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TH741

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国家自然科学基金(51375467, 11404312, 51775528, 51476154, 51404223 )、浙江省自然科学基金(LY15E050014)、浙江省“仪器科学与技术”重中之重学科开放基金(JL150508)项目资助


Dualpath point diffraction interference system forthreedimensional measurement
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1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China; 2. College of Electrical Engineering, Zhejiang University, Hangzhou 310027, China

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    摘要:

    针对在仅有一个光纤对的单路点衍射三维测量系统中,存在平行于条纹的横向方向上测量精度低的问题,提出了用于三维测量的双路点衍射干涉系统。分析了点衍射波前误差、测量探头结构布局以及三维迭代重构算法对于三维测量精度的影响,在此基础上确定点衍射源结构以及探头结构布局等最优系统参数。实验结果显示,单路点衍射干涉三维测量系统在xy方向的精度分别为亚微米量级和微米量级,而双路点衍射干涉仪系统可在三维方向上同时达到亚微米量级,验证了所提出的双路点衍射干涉系统方案的可行性和准确性。所提出的双路点衍射干涉系统有效的实现高精度三维测量,为无导轨三维位移和尺寸等测量提供了一种可行方法。

    Abstract:

    In the singlepath pointdiffraction threedimensional measurement system with only one fiber pair, the measurement accuracy in the lateral direction parallel to the fringle direction is poor. To solve this problem, a dualpath pointdiffraction interference system is proposed to enhance the accurate threedimensional measurement in this study. The influence of pointdiffraction wavefront error, structural layout of measuring probe and threedimensional iterative reconstruction algorithm on the threedimensional measurement accuracy is analyzed. Based on the analysis, the optimal system parameters (e.g., pointdiffraction source structure and structural layout of probe) are determined. The experimental results show that the accuracy of the singlepath pointdiffraction interference system for threedimensional measurement in the x and y directions are in the order of submicrons and microns, respectively. In comparison, the dualpath pointdiffraction interference system can reach the order of submicrons at three directrions. The feasibility and accuracy of the proposed system are verified. It provides a feasible method for the measurement threedimensional displacement and size without guide rail.

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王道档,王志超,赵军,王朝,孔明.用于三维测量的双路点衍射干涉系统[J].仪器仪表学报,2017,38(9):2146-2153

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  • 在线发布日期: 2017-11-01
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