The cantilever beam structure serves as a prevalent platform for micro-mass measurements. Conventional measurement methodologies necessitate a stable temperature environment, posing practical challenges. Temperature fluctuations profoundly impact measurement outcomes and pose difficulties in direct decoupling from the cantilever beam′s characteristic equation. This paper introduces a temperature decoupled mass sensing method, leveraging CBAM-CNN and a piezoelectric cantilever beam. Initially, a temperaturecontrolled measurement platform employing a resonant piezoelectric cantilever beam is established to capture impedance response signals across varied mass loads. An adaptive weighted preprocessing method is tailored to augment structural features and accentuate critical information within confined samples. Subsequently, a CBAM-CNN network, incorporating a hybrid domain attention mechanism, is devised to evaluate the relative relationships of multiple resonance peaks in the signals, achieving concurrent temperature decoupled mass sensing. Experimental findings underscore the method′s prowess, attaining an impressive 99. 70% accuracy in mass measurements ranging from 0. 1 g to 1 g within a temperature range spanning 25℃ to 55℃ . Moreover, the method exhibits precise mass sensing across a broad temperature spectrum, obviating the need for temperature compensation.