国家自然科学基金 ( 52175495, 52125503 )、 重庆市自然科学基金 ( cstc2020 jcyj-msxmX0917 )、 重庆英才项目 ( cstc2022ycjhbgzxm0098)资助
针对数字化精密机械加工装备和测量仪器中的关键功能部件———位移传感器测量精度过分依赖高精度加工的难题,提 出基于组合测量方式的新型位移传感新方法。 利用在平面上均匀分布的激励绕组产生交变磁场,构建运动参考系,建立位移和 时间基准之间的映射关系。 通过控制感应绕组的形状实现磁场精确约束,从原理上抑制谐波误差。 采用差分排布的感应绕组 式及组合测量方式增强抗干扰性,提高位移测量精度。 通过电磁仿真验证,进行测量误差分析,优化结构参数。 研制了传感器 样机并进行实验验证,结果表明在 144 mm 测量范围内,测量误差为±2. 25 μm,分辨力为 0. 15 μm。 不同于传统高精度位移传 感器严重依赖高精度光刻制造加工,此方法通过对磁场的精确约束和传感原理创新实现精密位移测量,具有结构简单,成本低 等优势具有重要学术和工程应用价值。
The key functional units — displacement sensors of digital high-precision measuring instruments and equipment rely heavily on high-precision machining. To address this issue, a novel displacement sensing principle based on a combined measurement method is proposed. The alternating magnetic field produced using the uniform distribution of the excitation winding on the plane is utilized to establish a moving reference system. The mapping relation is obtained between the measured displacement and the time reference. Magnetic field is restricted by precisely controlling the shape of the induction winding to suppress harmonic errors in principle. The differential arrangement of the induction winding and a combined measurement method are employed to improve its anti-interference ability and the measurement precision. The measurement error is analyzed by using the electromagnetic simulation to optimize structural parameters. The sensor prototype is produced and tested in experiment. The results show that the error is ±2. 25 μm within the range of 144 mm, and the resolution is 0. 15 μm. Differing from traditional high-precision displacement sensors relying heavily on high-precision lithographic machining, the proposed method makes full use of precisely restricted and innovation in sensing principles to perform highprecision displacement measurement with the feature of simple in structure and low cost, which has the significant academic value and the high application value.