The lithography machine represents the pinnacle of advanced equipment. The ultra-precision measurement is crucial to supporting the research, development, and manufacturing of these products, ensuring the precision and quality of the manufacturing process. This article provides an overview of the lithography industry′s characteristics and development trends, and explores the role of ultra-precision measurement in advancing lithography machine technology, examining its impact on components, subsystems, whole machine integration, and overall performance. The article also considers ways to enhance the precision capabilities of lithography machine products and the need to establish an ultra-precision measurement system, including an industrial measurement system to control the quality of ultra-precision lithography machine products and a metrology system to ensure measurement accuracy and reliability. Finally, the article proposes the necessity of establishing a measurement and testing center for the lithography machine industry.