Silicon micro-resonant accelerometers have advantages of small size, low cost, wide dynamic range, and high-precision quasidigital frequency signal output. But, the key performance indicators, such as zero bias and scale factor, are constrained by temperature and other factors, which cannot meet the high-performance requirements of high-precision navigation guidance. Therefore, on the basis of briefly introducing the temperature characteristics and temperature error sources of silicon micro-resonant accelerometers, this article reviews researches on temperature compensation of silicon micro-resonant accelerometers in recent years, including passive temperature compensation technology and active temperature compensation technology. The common methods and the latest research of passive temperature compensation technology and active temperature compensation technology are introduced. The advantages and disadvantages of various methods are analyzed and summarized. It is proposed to explore more accurate temperature measurement methods and isolation devices with better thermal isolation effect to design a micro-oven system with low power consumption, short preheating time and strong control stability for heating and temperature control at the device layer, and to seek more possibilities of combining passive compensation technology and active compensation technology to obtain the optimal combination of temperature compensation is the key research direction of subsequent temperature compensation work.