基于激光对刀仪的高精度在位测量及补偿方法
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TH74 TG596

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国家自然科学基金(51875223)、国防基础科研核科学挑战专题(TZ2018006)项目资助


High precision on-site measurement and compensation method based on the laser tool presetter
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    摘要:

    球型砂轮在位修整前后的直径变化将导致理想与实际的磨削轨迹之间出现位置偏差,造成加工误差,因此在超精密磨 削加工前获取该变化信息是十分有必要的。 针对于此,提出了一种球型砂轮在位测量方案,包括搭建基于激光对刀仪的在位测 量系统以及设计在位测量步骤,并针对该方案存在的系统误差进行分析,抽象出了激光对刀仪安装误差模型,结合齐次坐标变 换推导了误差公式,借助最小二乘法求解安装误差,从而实现了对测量数据的补偿与对球型砂轮的高精度在位测量。 最后以 12. 5 mm 半径的标准球做标定,计算出误差角度值用作补偿,再分别测量 12. 5 mm 与 3 mm 标准球作为验证。 实验表明该方案 可将测量精度从 4 μm 提高到 1. 2 μm。

    Abstract:

    The diameter change of the spherical grinding wheel after on-site dressing may lead to position deviation between ideal and actual grinding trajectory, which bring the machining error. Therefore, it is very necessary to obtain the change information before ultra-precision grinding. In view of this, this article proposes an on-site measurement scheme of the spherical grinding wheel, including the establishment of the on-site measurement system based on the laser tool presetter and on-site measurement steps design. The systematic error of this scheme is analyzed, the installation error model of laser tool presetter is abstracted, the error formula is deduced combined with homogeneous coordinate transformation, and the installation error is solved by the least square method. Therefore, the compensation of measurement data and high-precision on-site measurement of the spherical grinding wheel are realized. Finally, the standard ball with 12. 5 mm radius is used for calibration, and the error angle value is calculated for compensation. Then, the 12. 5 mm and 3 mm standard balls are measured for verification. Experimental results show that the measurement accuracy can be improved from 4 μm to 1. 2 μm.

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陶宇轩,刘秀峰,曹海印.基于激光对刀仪的高精度在位测量及补偿方法[J].仪器仪表学报,2021,(12):1-8

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  • 在线发布日期: 2023-06-28
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