基于长度可变真空腔的激光干涉空气折射率测量误差分析与补偿
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TH741

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国家自然科学基金(51875530,51475435)、浙江省自然科学基金(1Z18E050003)项目资助


Analysis and compensation of the measurement error of air refractive indexusing a laser interferometer with a variable length vacuum cavity
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    摘要:

    为了解决基于长度可变真空腔的激光干涉空气折射率测量中透光窗片倾斜和真空腔内残余气压对测量精度的影响,本文分析了真空腔拉伸过程中透光窗片倾斜引入的误差,并提出了透光窗片倾斜误差检测和补偿方法,同时研究了真空腔内残余气压的测量和补偿方法。为了验证所提出方法的可行性,搭建了基于长度可变真空腔的激光干涉空气折射率测量系统,测量结果与Edlen公式结果进行对比。实验结果显示,本系统测量结果与Edlen公式结果具有较好的一致性,在2.2h和20 min内,两者之间偏差的标准偏差分别为2.34×10³和2.89×10°,这表明本文所提出的空气折射率测量误差补偿方法是可行和有效的,可应用于激光干涉精密位移测量中空气折射率的实时补偿。

    Abstract:

    To salve the influenees of the tilt of optical windows and the residual air pressure in the vacuum cavity on the measurementaccuracy in the laser interferometrie air refractive index measurement based on the variable length vacuum cavity, this paper analyzes theerror caused by the optical window tilt when the vacauum cavity is pulled. And a method for detecting and compensating the tilt ermor ofwindows is proposed. In addition, the method of measuring and compensating the air residual pressure in the vacuum cavity is studied.To verify the effeetiveness of the proposed method, a laser interferometrie air refractive index measurement system based on the variablelength vacuum cavity is constructed, the measurement results with proposed method are eompared with the results obtained by Edlénequation, Experimental results show that, the measurement results of the two method are in good agreement. In 2.2 h and 20 min,thestandard deviations of the differences between the measurement results of the proposed method and that of the Edlen equation are 2.34×10and 2.89×10⁻°,respectively. This indicates that the proposed measurement error eompensation method of air refractive indexis feasible and effective, which can be applied to the real-time compensation of air refractive index in laser interferometrie precisiondisplacement measurement.

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杨 晔,严利平,陈本永,楼盈天.基于长度可变真空腔的激光干涉空气折射率测量误差分析与补偿[J].仪器仪表学报,2021,(6):48-55

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  • 在线发布日期: 2023-06-28
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