一种离散阵列的平面二维电场式时栅位移传感器
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TH7

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国家自然科学基金(51905063,51935004)、重庆市教委科学技术研究项目(KJQN201801127)资助


Planar two-dimensional electric field time-grating displacement sensor with discrete array
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    摘要:

    针对平面二维光栅位移测量技术在高精度和大量程之间难以兼顾的现状,基于前期一维电场式时栅的研究基础,提出 了一种离散阵列结构的二维电场式时栅位移传感器。 传感器采用平面正交离散栅面空间排布的编码方法,实现了对平面二维 电场式时栅激励电极编码;建立了平面二维电场式时栅位移测量模型,从理论上推导了受 X 和 Y 两个方向位移信息调制的耦 合信号表达式;提出了一种二维位移测量信号直接解耦方法,利用差动感应电极空间位置关系,通过简单的加减运算实现了测 量信号的解耦。 使用 PCB 工艺制造了传感器样机并进行了性能测试,验证了提出的编码和解耦方法的可行性。 最终结果表 明,所提出的传感器在 160 mm×160 mm 测量范围内,X 和 Y 方向测量误差峰峰值分别为 13. 1 μm 和 11. 8 μm。

    Abstract:

    The planar two-dimensional grating displacement measurement technology is difficult to achieve balance between high precision and large range. To address this issue, a two-dimensional electric field time grating displacement sensor with a discrete array structure is designed, which is based on the research foundation of the one-dimensional electric field time grating in the early stage. A coding method of planar orthogonal discrete grating surface spatial arrangement is utilized in the sensor to realize the coding of planar two-dimensional electric field time grid excitation electrodes. A planar two-dimensional electric field time grating displacement measurement model is formulated, and the coupling signal expression modulated by the displacement information in the X and Y directions is theoretically deduced. A method for direct decoupling of two-dimensional displacement measurement signals is proposed, which uses the spatial position relationship of differential sensing electrodes to realize the decoupling of measurement signals through simple addition and subtraction operations. The sensor prototype is established by using PCB technology and performance tests are implemented to evaluate the feasibility of the proposed coding and decoupling method. The final result shows that the sensor proposed in this paper has the peak - to - peak measurement errors of 13. 1 μm and 11. 8 μm in X and Y directions respectively in the measurement range of 160 mm×160 mm.

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王合文,彭 凯,刘小康,蒲红吉,于治成.一种离散阵列的平面二维电场式时栅位移传感器[J].仪器仪表学报,2021,(3):88-96

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  • 在线发布日期: 2023-06-28
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